JPH06460Y2 - シリンダ型気相成長装置 - Google Patents
シリンダ型気相成長装置Info
- Publication number
- JPH06460Y2 JPH06460Y2 JP14680988U JP14680988U JPH06460Y2 JP H06460 Y2 JPH06460 Y2 JP H06460Y2 JP 14680988 U JP14680988 U JP 14680988U JP 14680988 U JP14680988 U JP 14680988U JP H06460 Y2 JPH06460 Y2 JP H06460Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas supply
- gas
- reaction tube
- baffle
- cylinder type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001947 vapour-phase growth Methods 0.000 title claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 238000010926 purge Methods 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 37
- 239000012495 reaction gas Substances 0.000 description 21
- 239000010408 film Substances 0.000 description 15
- 235000012431 wafers Nutrition 0.000 description 7
- 239000010409 thin film Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14680988U JPH06460Y2 (ja) | 1988-11-10 | 1988-11-10 | シリンダ型気相成長装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14680988U JPH06460Y2 (ja) | 1988-11-10 | 1988-11-10 | シリンダ型気相成長装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0266682U JPH0266682U (en]) | 1990-05-21 |
JPH06460Y2 true JPH06460Y2 (ja) | 1994-01-05 |
Family
ID=31416642
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14680988U Expired - Lifetime JPH06460Y2 (ja) | 1988-11-10 | 1988-11-10 | シリンダ型気相成長装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH06460Y2 (en]) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5636564B2 (ja) | 2010-10-28 | 2014-12-10 | コクヨ株式会社 | カッターナイフ |
-
1988
- 1988-11-10 JP JP14680988U patent/JPH06460Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5636564B2 (ja) | 2010-10-28 | 2014-12-10 | コクヨ株式会社 | カッターナイフ |
Also Published As
Publication number | Publication date |
---|---|
JPH0266682U (en]) | 1990-05-21 |
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